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Micro Electrical Mechanical System (MEMS) microchip

Micro Electrical Mechanical System (MEMS) microchip
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Description: Micro Electrical Mechanical System (MEMS) microchip. Showing the large depth of field possible with our microscope, the popup mountain device is visible raised in comparison to the chip as a whole. This device is powered solely by the electron beam itself, using a technique know as micro charge pump actuation.
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Source: https://biology-forums.com/index.php?action=gallery;sa=view;id=8565
Keywords: Micro Electrical Mechanical System (MEMS) microchip 
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